粉末与颗粒镀膜原子层沉积系统

ALD REACTOR SYSTEMS

Fluidized
    Bed Reactors
    (FBR)

Rotary Reactors (Rotary)

Continuous Vibrating Reactors (CVR)

Substrate Volume

75mL to 10L per batch

10ml to 40L

15L/hr to 150L/hr

Substrate Mass
    (Density Dependent)

75g - 12.5kg per batch

10g - 50kg per batch

15kg/hr to 150kg/hr

Vapor Draw Sources

2 standard,
    up to 8

2 standard,
    up to 8

2 standard,
    up to 8

Regulatory Compliance

CE, GMP and ISO compliance upon request

Weight

300 lbs -
    1,000 lbs (150kg - 500kg)

300lbs - 4,000lb (150kg
    - 2000kg)

500lbs - 8,000lb (250kg - 4000kg)

Venting  Emissions and   Abatement

Equipment can be designed to comply with local jurisdiction   codes and regulations

Electrical Requirements

Project-specific and customized. Further details can be   supplied upon request

Demonstrated Particle Diameters

10 nm - 500micron

10 nm - 200micron

5-50micron

Potential  Particle   Diameters

2 nm - 1mm

2 nm - 250px

10nm - 1 cm

Other Features

Highest Precursor Efficiency

Plasma ALD Compatible

Atmospheric Pressure Operation

Reactor Style:

Fluidization Reactor

Substrate Volume:

75 or 150 mL

Reactor Temperatures Range:

25 – 450 °C

Maximum Process Line Temperatures:

200 °C

Vapor Draw Sources:

2 standard, up to 4

Dosing Valves:

Heated Metal Diaphragm

Vacuum Pump:

Rotary Vane (9 CFM or greater)

Regulatory Compliance:

CE Marked

Weight:

300 lbs/ 140 kg

Options Available:

Substrate Loading

Low Vapor Pressure Containers capable of   150 °C

Residual Gas Analyzer

Waste Abatement

Glovebox

Research License for ALD on Particles

Various Vapor Sources

Reactor Style:

Fluidization Reactor

Substrate Volume:

500 mL / 2 L / 5 L / 10 L

Reactor Temperatures Range:

25 – 450 °C

Maximum Process Line Temperatures:

200 °C

Vapor Draw Sources:

2 standard, up to 8

Dosing Valves:

Heated Metal Diaphragm

Vacuum Pump:

Rotary Vane (9 CFM or greater)

Regulatory Compliance:

CE Marked

Weight:

400 lbs/ 180 kg

Options Available:

Substrate Loading

Low Vapor Pressure Containers capable of 150 °C

Residual Gas Analyzer

Waste Abatement

Research License for ALD on Particles

Various Vapor Sources

Reactor Style:

Rotary Reactor

Substrate Volume:

~40 L

Reactor Temperatures Range:

25 – 200 °C

Maximum Process Line Temperatures:

200 °C

Vapor Draw Sources:

2 standard, up to 8

Dosing Valves:

Heated Metal Diaphragm

Vacuum Pump:

Rotary Vane (9 CFM or greater)

Regulatory Compliance:

CE Marked

Weight:

500 lbs/ 230 kg

Options Available:

Substrate Loading

Low Vapor Pressure Containers capable of 150 °C

Residual Gas Analyzer

Waste Abatement

Integrated Glovebox

Research License for ALD on Particles

Various Vapor Sources

Reactor Style:

Rotary Reactor

Substrate Volume:

10 or 40 mL

Reactor Temperatures Range:

25 – 200 °C

Maximum Process Line Temperatures:

200 °C

Vapor Draw Sources:

2 standard, up to 8

Dosing Valves:

Heated Metal Diaphragm

Vacuum Pump:

Rotary Vane (9 CFM or greater)

Regulatory Compliance:

CE Marked

Weight:

300 lbs/ 140 kg

Options Available:

Substrate Loading

Plasma Source from Meaglow

Low Vapor Pressure Containers capable of 150 °C

Residual Gas Analyzer

Waste Abatement

Integrated Glovebox

Research License for ALD on Particles

Various Vapor Sources